Ultra-Low Vibration Assessment for Semiconductor Facility
Project Overview
- Construction of a new semiconductor plant
- Ultra-low vibration assessment for precision equipment areas affected by vibrations generated from facility operations
- Comparison with allowable criteria for precision equipment and application of vibration isolation measures if limits are exceeded
- Application of vibration isolation using HD-MAT-50T and vibration isolation tables
- Vibration levels met recommended criteria after implementation of isolation measures
3D Modeling
Current Condition Prediction
Comparison of Ultra-Low Vibration Analysis Results
Vibration Isolation Measures
CASE 1 – Vibration Isolation Measures Using Damping Mats
CASE 1 – Vibration Control System Using Air-Spring Mounts
